Tungsten Hexafluoride

Specification    
Purity,% 99.9995%
Oxygen ≤ 0.5 ppmv
Nitrogen ≤ 0.5 ppmv
Carbon dioxide ≤ 0.5 ppmv
Carbon monoxide ≤ 0.5 ppmv
Carbon tetrafluoride ≤ 0.5 ppmv
Silicon tetrafluoride ≤ 0.5 ppmv
Sulfur hexafluoride ≤ 0.5 ppmv
Acidity (HF) ≤ 0.5 ppmv

transportation    
DOT shipping name Tungsten hexafluoride
DOT classification 2.3
DOT label Toxic gas, corrosion
UN NO. UN 2196
CAS No. 7783-82 -6
CGA/DISS/JIS 670/638/W22-14R
Transportation status Liquefied gas

Technical Information    
Cylinder condition @ 21.1°C liquid
The combustion limit in the air is not combustible
Natural temperature (°C)-
Molecular weight (g/mol) 297.84
Specific gravity (air =1) 10.674
Critical temperature (°C) 169.67
Critical temperature (psig) 604.6

Application
Used in semiconductor engineering, used as a metal contact (metal contact) in chemical vapor deposition (CVD) engineering, and mainly used in semiconductor manufacturing engineering as a metal material for forming a contract plug (Contract Plug).