Basic Info
  • Grade: Pharmaceutical Grade

    Factory Location: Building A311, Building A, No. 1255 Jinhai Road, Pudong New Area, Shanghai (Dingxin Building)

    Main Sales Markets: North America,Central/South America,Western Europe,Eastern Europe,Australasia,Asia,Middle East,Africa

  • Sample Provided: no

    Payment Terms: L/L

    Specification    
    Purity,% 99.95
    Resistivity ≥ 300 ohm-cm
    Boron ≤ 0.1 ppba silicon
    Carbon ≤ 5 ppma
    Iron ≤ 5 ppba
    Other chlorosilanes ≤ 500 ppm


    transportation    
    DOT shipping name Trichlorosilane
    DOT classification 4.3
    DOT label Flammable liquid, corrosive
    UN NO. UN 1295
    CAS No. 10025-78-2


    Technical Information    
    Cylinder condition @ 21.1°C liquid
    Combustion limit in air 7-83%
    Natural temperature (°C) 182
    Molecular weight (g/mol) 135.45
    Specific gravity (air =1) 4.67
    Critical temperature (°C) 242.5
    Critical temperature (psig)


    Application
    1. Chemical reactions in organosilicon
    2. In semiconductor manufacturing: epitaxial deposition of silicon.

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