Silicon Tetrafluoride

Specification    
Purity,% 99.99
Oxygen ≤1.0 ppmv
Nitrogen ≤3.0 ppmv
Carbon dioxide ≤1.0 ppmv
Carbon monoxide ≤0.5 ppmv
Total hydrocarbon (CH4) ≤10.0 ppmv
Arsenic ≤0.5 ppmv
Boron ≤0.5 ppmv
Phosphorus ≤0.5 ppmv
Hydrogen fluoride ≤50.0ppmv

transportation    
DOT shipping name Silicon tetrafluoride
DOT classification 2.3
DOT label Toxic, corrosive
UN NO. UN 1859
CAS No. 7783-61-1
CGA/DISS/JIS 330/642/W22-14L
Transport state Compressible gas

Technical Information    
Cylinder condition @ 21.1°C gas
The combustion limit in the air is not combustible
Natural temperature (°C)-
Molecular weight (g/mol) 104.08
Specific gravity (air =1) 4.67
Critical temperature (°C) -14.15
Critical temperature (psig) 524.59

Application
Used in chemical vapor deposition process; preparation of fluorosilicic acid and its salts.