Silicon Tetrachloride

Specification    
Purity,% 99.94
Resistivity ≥ 300 ohm-cm
Boron ≤ 0.3 ppba silicon
Aluminum ≤ 50 ppbw
Carbon ≤ 1.0 ppma
Iron ≤ 50 ppbw
Other chlorosilanes ≤ 600 ppm

transportation    
DOT shipping name silicon tetrachloride
DOT category 8 (corrosive materials)
DOT label corrosion
UN NO. UN 1818
CAS No. 1026-04-7
Transportation status Liquefied gas

Technical Information    
Cylinder condition @ 21.1°C liquid
The combustion limit in the air is not combustible
Natural temperature (°C)-
Molecular weight (g/mol) 169.89
Specific gravity (air =1) 5.889
Critical temperature (°C) 233.85
Critical temperature (psig) 529.05

Application
1. In semiconductor manufacturing, the application of epitaxial silicon.
2. In semiconductor manufacturing, metal plasma etching.
3. In the silicone process.
4. Manufacturing of fused silica fiber.