Halocarbon 23 - Trifluoromethane - ( CHF3 )

Name: Halocarbon 23 - Trifluoromethane - ( CHF3 )
Availability: halocarbon-23-trifluoromethane-chf3-273891.html

Category:Fine Chemicals > Other Fine Chemicals
Product Name:Halocarbon 23 - Trifluoromethane - ( CHF3 )
CAS No.:75-46-7
Standard:In-house Standards
Price(USD):Negotiable
Company:Shanghai Wechem Technology Limited

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Basic Info

Grade: Pharmaceutical Grade

Factory Location: Building A311, Building A, No. 1255 Jinhai Road, Pudong New Area, Shanghai (Dingxin Building)

Main Sales Markets: North America,Central/South America,Western Europe,Eastern Europe,Australasia,Asia,Middle East,Africa
Sample Provided: no

Payment Terms: L/L

Specifications
Purity , %	99.9	99.999
Oxygen	≤80 ppmv	≤1.0 ppmv
Nitrogen	≤300 ppmv	≤4.0 ppmv
Carbon Dioxide	≤50 ppmv	≤0.5 ppmv
Carbon Monoxide	≤30 ppmv	≤0.5 ppmv
Methane	≤30 ppmv	≤0.5 ppmv
Other Organics	≤400ppmv	≤2.0 ppmv
Water	≤10.0 ppmv	≤2.0 ppmv
Acidity as HCL	≤1.0 ppmv	≤0.1 ppmv

Ship
DOT Shipping Name	Trifluoromethane
DOT Classification	2.2
DOT Label	Non-flammable
UN Number	UN 1984
CAS No.	75-46-7
CGA/DISS/JIS	660/716/W22-14L
Shipped as	Liquefied Gas

Technical Information
Cylinder State @ 21.1°C	Liquid
Flammable Limits In Air	Non-flammable
Auto Ignition Temperature (°C )	-
Molecular Weight (g/mol)	70
Specific gravity (air =1)	2.436
Critical Temperature ( °C )	178.43
Critical Pressure ( psig )	686.719

Applications
· Trifluoromethane (CHF3) is used in plasma etching of silicon oxide or nitride layers. · CHF3 is a low temperature refrigerant. It is replacing chlorodifuoromethane (R22 or CHF2Cl)

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