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Email ：PharmaSources@imsinoexpo.com
Whatsapp ：+86-13621645194
Factory Location: Building A311, Building A, No. 1255 Jinhai Road, Pudong New Area, Shanghai (Dingxin Building)
Main Sales Markets: North America,Central/South America,Western Europe,Eastern Europe,Australasia,Asia,Middle East,Africa
Sample Provided: no
Payment Terms: L/L
Specifications
Purity , %
99.9
99.999
Oxygen
≤100 ppmv
≤1.0 ppmv
Nitrogen
≤400 ppmv
≤4.0 ppmv
Carbon Dioxide
≤80 ppmv
≤0.5 ppmv
Carbon Monoxide
≤50 ppmv
≤0.5 ppmv
Methane
≤50 ppmv
≤0.5 ppmv
Other Halocarbons
≤100 ppmv
≤2.0 ppmv
Water
≤10 ppmv
≤2.0 ppmv
Sulfur Hexafluoride
≤15 ppmv
≤1.0 ppmv
Acidity as HF
≤1.0ppmv
≤0.1ppmv
Ship
DOT Shipping Name
Tetrafluoromethane, Compressed
DOT Classification
2.2
DOT Label
non-flammable Gas
UN Number
UN1982
CAS No.
75-73-0
CGA/DISS/JIS
320/716/W22-14L
Shipped as
Compressed Gas
Technical Information
Cylinder State @ 21.1°C
Gas
Flammable Limits In Air
Non-flammable
Auto Ignition Temperature (°C )
-
Molecular Weight (g/mol)
88.01
Specific gravity (air =1)
3.04
Critical Temperature ( °C )
-45.65
Critical Pressure ( psig )
528.459
Applications
One of the largest comsuption kinds of plasma etching gases in microelectronics industry , also widely used in surface cleaning of electronic device , manufacture of solar cell, laser technology , gas phase insulation , subzero refrigeration , leakage inspection agent and decontaminant of manufacture of printed circuit .
Audited Supplier
Pharma Sources Insight January 2025
