Basic Info
  • Grade: Pharmaceutical Grade

    Factory Location: Building A311, Building A, No. 1255 Jinhai Road, Pudong New Area, Shanghai (Dingxin Building)

    Main Sales Markets: North America,Central/South America,Western Europe,Eastern Europe,Australasia,Asia,Middle East,Africa

  • Sample Provided: no

    Payment Terms: L/L

    Specifications     
    Purity , % 99.9 99.999
    Oxygen  ≤80 ppmv ≤1.0 ppmv
    Nitrogen ≤300 ppmv ≤4.0 ppmv
    Carbon Dioxide ≤50ppmv ≤0.5ppmv
    Carbon Monoxide ≤30 ppmv ≤0.5 ppmv
    Methane  ≤30 ppmv ≤0.5 ppmv
    Water  ≤10 ppmv ≤1.5 ppmv
    CF4 ≤100 ppmv ≤1.0 ppmv
    Other Organics  ≤400 ppmv ≤2.0 ppmv
    Acidity as HCL  ≤1.0 ppmw ≤0.1 ppmw
         
    Ship    
    DOT Shipping Name  Hexafluoroethane Compressed   
    DOT Classification 2.2  
    DOT Label  non-flammable Gas   
    UN Number  UN2193  
    CAS No. 76-16-4  
    CGA/DISS/JIS 660/716/W22-14L  
    Shipped as  liquefied Gas   
         
    Technical Information    
    Cylinder State @ 21.1°C  Liquid  
    Flammable Limits In Air  Non-flammable   
    Auto Ignition Temperature (°C ) -  
    Molecular Weight (g/mol) 138.01  
    Specific gravity (air =1) 4.82  
    Critical Temperature ( °C ) 19.65  
    Critical Pressure ( psig ) 417.5  
         
    Applications    
    Insulation gas and plasma etching agent .
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