Electronic Grade phosphorus oxychloride

1. Molecular formula: POCl3
2. Molecular weight: 153.35
Three, physical and chemical properties:
Colorless transparent volatile liquid with strong pungent odor. It is easily hydrolyzed in humid air to produce phosphoric acid and hydrochloric acid. The melting point is 1.25°C, the boiling point is 102°C, and the relative density is 1.675. The heat of evaporation is 33.7kJ/mol. It is still very stable when it is close to 300°C. It explodes when encountering large amounts of water. Toxic and corrosive.
Four, use:
It is mainly used for the N-type doping of chips. It is a liquid phosphorus source for the production of integrated circuits, solar cells, optical fiber preforms, separation devices, etc. It is an electronic chemical necessary in the chip manufacturing process. At the same time, electronic grade phosphorus oxychloride is also highly manufactured. Raw material for pure phosphate ester.
Five, quality indicators:
Analysis item Technical index (ppb) Analysis item Technical index (ppb)

6N 7N 6N 7N

As,max 30 6 Mg,max 20 5

Ba,max 20 1 Mn,max 30 1

Ca,max 30 5 Ni,max 20 1

Co,max 20 1 Pb,max 10 3

Cu,max 20 2 Sr,max 5 1

Cr,max 20 1 Ti,max 5 2

Fe,max 40 5 Zn,max 5 1

Al,max 40 5 K,max 30 3

Ag,max 1 1 Li,max 10 6

Au,max 1 1 Na,max 10 5

Bi,max 10 1 Nb,max 2 1

Ga,max 1 1 Sn,max 5 1

Hg,max 10 5 content, min 99.90% 99.90%

Chromaticity, max 5 5 particles, Size, #/ml ≥0.3um, 50max ≥0.3um, 50max

Six, packaging
Container: Quartz glass source bottle or steel drum lined with PFA material.
Outer packaging: thick PVC plastic bag with container jacket; PE plastic special box with built-in sponge cushion.
Specifications: 400ml, 1000ml, 1500ml, 20L, can also be packaged according to user requirements.