Electronic Grade Ethyl Silicate

Tetraethyl orthosilicate (TEOS)
Chemical formula C8H20O4Si
Relative molecular weight 208.33
CAS number 28767
Physical and chemical properties Colorless transparent liquid, melting point -77°C, boiling point 168.5°C, density 0.9346g/ml. Relatively stable in the air; slightly soluble in water, slow hydrolysis in pure water; in the presence of acid or alkali can accelerate the hydrolysis.
Main uses Mainly used in the chemical vapor deposition (CVD) process in the wafer manufacturing process to generate silicon dioxide and silicon nitride films. It is the electronic chemicals required for the manufacture of semiconductors, discrete devices, and micro-electromechanical systems (MEMS).
typical application    

CVD type material

APCVD TEOS,O3

LPCVD TEOS

PECVD TEOS, O2

Product Standards    

Item Standard Value Item Standard Value Standard Value
Purity 99.999999% (8N) Niobium (Nb) max 0.1ppb
Aluminum (Al) max 0.2ppb Nickel (Ni) max 0.2ppb
Silver (Ag) max 0.1ppb Lead (Pb) max 0.1ppb
Arsenic (As) max 0.4ppb Antimony (Sb) max 0.1ppb
Gold (Au) max 0.1ppb Tin (Sn) max 0.2ppb
Boron (B) max 0.5ppb Strontium (Sr) max 0.1ppb
Barium (Ba) max 0.1ppb Thorium (Th) max 0.1ppb
Beryllium (Be) max 0.1ppb Titanium (Ti) max 0.1ppb
Bismuth (Bi) max 0.1ppb Uranium (U) max 0.1ppb
Calcium (Ca) max 0.5ppb Vanadium (V) max 0.1ppb
Cadmium (Cd) max 0.1ppb Tungsten (W) max 0.1ppb
Cobalt (Co) max 0.4ppb Zinc (Zn) max 0.2ppb
Copper (Cu) max 0.2ppb Zirconium (Zr) max 0.1ppb
Chromium (Cr) max 0.2ppb Cl- max 0.5 ppm
Iron (Fe) max 0.2ppb Moisture max 5 ppm
Gallium (Ga) max 0.4ppb Ethanol content max 3 ppm
Mercury (Hg) max 0.3ppb particle number ≥0.2µm max 30 p/ml
Potassium (K) max 0.2ppb particle number ≥0.3µm max 20 p/ml
Lithium (Li) max 0.1ppb Particle number ≥0.5µm max 10 p/ml
Magnesium (Mg) max 0.5ppb particle number ≥1.0µm max 3 p/ml
Manganese (Mn) max 0.1ppb Chroma ＜10APHA
Molybdenum (Mo) max 0.1ppb Appearance Colorless transparent liquid
Sodium (Na) max 0.5ppb shelf life 24 months
Packing method 316L stainless steel bottle with stainless steel cabinet outside.