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Email ：PharmaSources@imsinoexpo.com
Whatsapp ：+86-13621645194
Factory Location: Building A311, Building A, No. 1255 Jinhai Road, Pudong New Area, Shanghai (Dingxin Building)
Main Sales Markets: North America,Central/South America,Western Europe,Eastern Europe,Australasia,Asia,Middle East,Africa
Sample Provided: no
Payment Terms: L/L
Specifications
Purity
99.998
Oxygen + Argon
≤1 ppmv
Nitrogen
≤1 ppmv
Carbon Monoxde
≤1 ppmv
Carbon Dioxide
≤1 ppmv
THC as CH4
≤1 ppmv
TCS ( Total Chlorosilanes )
≤ 0.2 ppmv
Higher silane
≤ 50 ppmv
Silane
≤ 200 ppmv
Water
≤ 1 ppmv
Ship
DOT Shipping Name
Compressed Gas Flammable, NOS ( Disilane )
DOT Classification
2.1 ( Flammable Gas )
DOT Label
Flammable Gas
UN Number
UN 1954
CAS No.
1590-87-0
CGA/DISS/JIS
350/632/W22-14L
Shipped as
LiquefiedGas
Technical Information
Cylinder State @ 21.1°C
Liquid
Flammable Limits In Air
2-98%
Auto Ignition Temperature (°C )
-100
Molecular Weight (g/mol)
62.22
Specific gravity (air =1)
2.1
Critical Temperature ( °C )
150.85
Critical Pressure ( psig )
747
Applications
.Mainly used for miniaturization semiconductors manufacturing process in the high spedd and low temperature deposition of uniform thin films . .The core applicitons such as process below 20nm node IC semiconductors , advanced memory chips ( DRAM/NAND Flash ), also used in gas mixture for HIT solar cells , LTPS TFT/LCD display panels , and LED .
Audited Supplier
Pharma Sources Insight January 2025
