Dichlorosilane - ( SiH2CL2 ,DCS )

Name: Dichlorosilane - ( SiH2CL2 ,DCS )
Availability: dichlorosilane-sih2cl2-dcs-273853.html

Category:Fine Chemicals > Other Fine Chemicals
Product Name:Dichlorosilane - ( SiH2CL2 ,DCS )
CAS No.:4109-96-0
Standard:In-house Standards
Price(USD):Negotiable
Company:Shanghai Wechem Technology Limited

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Basic Info

Grade: Pharmaceutical Grade

Factory Location: Building A311, Building A, No. 1255 Jinhai Road, Pudong New Area, Shanghai (Dingxin Building)

Main Sales Markets: North America,Central/South America,Western Europe,Eastern Europe,Australasia,Asia,Middle East,Africa
Sample Provided: no

Payment Terms: L/L

Specifications
Purity , %	99	99.9
Typical Resistivity	≥ 200 ohm-cm	≥ 400 ohm-cm
Monochlorosilane	≤ 0.2%	≤ 100 pm
Trichlorosilane	≤ 0.5%	≤ 200 pm
Silicon Tetrachloride	≤ 0.1%	≤ 100 pm
Other Chlorosilanes	≤ 1 wt %	≤ 500 pm

Ship
DOT Shipping Name	Poison Inhalation Hazard
DOT Classification	2.3
DOT Label	Poison Gas, Nonflammable Gas
UN Number	UN 2189
CAS No.	4109-96-0
CGA/DISS/JIS	678/636/W22-14L
Shipped as	Liquefied Gas


Technical Information
Cylinder State @ 21.1°C	Liquid
Flammable Limits In Air	4.1-98.8%
Auto Ignition Temperature (°C )	100
Molecular Weight (g/mol)	101.01
Specific gravity (air =1)	3.47
Critical Temperature ( °C )	175.85
Critical Pressure ( psig )	678.2

Applications
· SiH2CL2 is silicon precursor gas used in combination with ammonia for silicon nitride chemical vapor deposition ( CVD ). ·Also used for epitaxial silicon deposition .

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