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Email ：PharmaSources@imsinoexpo.com
Whatsapp ：+86-13621645194
Factory Location: Building A311, Building A, No. 1255 Jinhai Road, Pudong New Area, Shanghai (Dingxin Building)
Main Sales Markets: North America,Central/South America,Western Europe,Eastern Europe,Australasia,Asia,Middle East,Africa
Sample Provided: no
Payment Terms: L/L
Specifications
Purity , %
99.9
Oxygen
≤20 ppmv
Nitrogen
≤50 ppmv
Hydrogen Fluoride
≤700 ppmv
Ship
DOT Shipping Name
Chlorine Trifluoride
DOT Classification
2.3
DOT Label
Poison Gas , Oxidiser and Corrosive
UN Number
UN 1045
CAS No.
7790-91-2
CGA/DISS
670/728
Shipped as
Liquefied Gas
Technical Information
Cylinder State @ 21.1°C
Liquid
Flammable Limits In Air
Non flammable
Auto Ignition Temperature (°C )
-
Molecular Weight (g/mol)
66.007
Specific gravity (air =1)
3.14
Critical Temperature ( °C )
23.85
Critical Pressure ( psig )
823.2
Applications
In the semiconductor industry, chlorine trifluoride is used to clean chemical vapour deposition chambers. It has the advantage that it can be used to remove semiconductor material from the chamber walls without having to dismantle the chamber. Unlike most of the alternative chemicals used in this role, it does not need to be activated by the use of plasma since the heat of the chamber is enough to make it decompose and react with the semiconductor material
Audited Supplier
Pharma Sources Insight June 2024: Globalization on the Go
